1.

Conference Proceedings
Conference Proceedings
1. Design and fabrication of soft x-ray transmission phase gratings
K. Qiu ; X. Xu ; Y. Liu ; Y. Hong ; S. Fu
Pub. info.: Advanced optical manufacturing technologies.  2  pp.67223R-1-67223R-6,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6722
2.

Conference Proceedings
Conference Proceedings
2. Methods of controlling grooves profile and the duty cycle of gold transmission phase gratings
K. Qiu ; X. Xu ; Y. Liu ; Y. Hong ; S. Fu
Pub. info.: Holography and diffractive optics III : 12-14 November 2007, Beijing, China.  pp.68322L-1-68322L-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6832
3.

Conference Proceedings
Conference Proceedings
3. Reactive ion beam etching of multilayer diffraction gratings with SiO2 as the top layer
Y. Liu ; X. Xu ; Y. Hong ; D. Xu ; S. Fu
Pub. info.: Holography and diffractive optics III : 12-14 November 2007, Beijing, China.  pp.68322O-1-68322O-5,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6832
4.

Conference Proceedings
Conference Proceedings
4. Reactive ion beam etching of large-aperture multilayer diffraction gratings by radio frequency ion beam source
Y. Liu ; D. Xu ; X. Xu ; Y. Hong ; S. Fu
Pub. info.: Design, manufacturing, and testing of micro- and nano-optical devices and systems : 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies : 8-12 July 2007, Chengdu, China.  pp.67240K-1-67240K-5,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6724