1.

Conference Proceedings

Conference Proceedings
Cho, C. R. ; Brown, R. A. ; Kononchuk, O. ; Yarykin, N. ; Rozgonyi, G. ; Zuhr, R.
Pub. info.: Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.73-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 532
2.

Conference Proceedings

Conference Proceedings
Yarykin, N. ; Zhang, R. ; Rozgonyi, G.
Pub. info.: Micro- and Nanoelectronics 2005.  pp.626017-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6260