Cho, C. R. ; Brown, R. A. ; Kononchuk, O. ; Yarykin, N. ; Rozgonyi, G. ; Zuhr, R.
Pub. info.:
Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.73-, 1998. Warrendale, Pa.. MRS - Materials Research Society