1.

Conference Proceedings
Conference Proceedings
1. EPITAXIAL GROWTH AND STABILITY OF 649 TiSi2 ON Si(111)
Jeon, Hyeongtag ; Honeycutt, J. W. ; Sukow, C. A. ; Humphreys, T. P. ; Nemanich, R. J. ; Rozgonyi, G. A.
Pub. info.: Epitaxial heterostructures : symposium held April 16-19, 1990, San Francisco, California, U.S.A..  pp.595-600,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 198
2.

Conference Proceedings
Conference Proceedings
2. Delineation of p-n Junctions on Cross Sectional TEM Device Samples
Knoesen, D. ; Zhang, F ; Rozgonyi, G. A.
Pub. info.: Specimen preparation for transmission electron microscopy of materials--II : symposium held April 19-20, 1990, San Francisco, California, U.S.A..  pp.299-308,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 199
3.

Conference Proceedings
Conference Proceedings
3. RAPID THERMAL PROCESSING OF MULTIPLE LOW DOSE OXYGEN IMPLANTATIONS FOR SIMOX
Blake, J. ; Gelpey, J. C. ; Lee, D. M. ; Rowland, L. ; Rozgonyi, G. A.
Pub. info.: Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.61-66,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 107
4.

Conference Proceedings
Conference Proceedings
4. DYNAMIC ANNEALING PHENOMENA AND THE ORIGIN OF RTA-INDUCED “HAIRPIN" DISLOCATIONS
Maszara, W. ; Sadana, D. K. ; Rozgonyi, G. A. ; Sands, T. ; Washburn, J. ; Wortman, J. J.
Pub. info.: Energy beam-solid interactions and transient thermal processing/1984 : symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A..  pp.277-286,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 35
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Conference Proceedings
Conference Proceedings
5. EXTRINSIC GETTERING WITH EPITAXIAL MISFIT DISLOCATIONS
Salih, A. S. M. ; Maszara, W. ; Kim, H. J. ; Rozgonyi, G. A.
Pub. info.: Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A..  pp.61-70,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 36
6.

Conference Proceedings
Conference Proceedings
6. EFFECTS OF CONCURRENT Co OR Ti SILICIDATION ON TRANSIENT DIFFUSION AND END-OF-RANGE DAMAGE IN PHOSPHORUS IMPLANTED SILICON
Honeycutt, J. W. ; Ravi, J. ; Rozgonyi, G. A.
Pub. info.: Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A..  pp.701-706,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 262
7.

Conference Proceedings
Conference Proceedings
7. METALLIC IMPURITIES IN n- AND p-TYPE SILICON: DLTS STUDIES
Agarwal, Aditya ; Radzimaski, Z. J. ; Buczkowski, Z. ; Shimura, F. ; Rozgonyi, G. A.
Pub. info.: Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A..  pp.615-620,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 262
8.

Conference Proceedings
Conference Proceedings
8. EBIC ANALYSIS OF GETTERING AT Si-Si(Ge) HETEROEPITAXIAL MISFIT DISLOCATIONS AS A FUNCTION OF IMPURITY DECORATION
Kirk, H. R. ; Radzimaski, Z. J. ; Fitzgerald, E. A ; Rozgonyi, G. A.
Pub. info.: Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A..  pp.609-614,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 262
9.

Conference Proceedings
Conference Proceedings
9. TiSi2 THIN FILMS FORMED ON CRYSTALLINE AND AMORPHOUS SILICON
Xiao, Z. G. ; Jiang, H. ; Honeycutt, J. ; Osburn, C. M. ; McGuire, G. ; Rozgonyi, G. A.
Pub. info.: Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A..  pp.167-172,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 181
10.

Conference Proceedings
Conference Proceedings
10. ELECTRICAL CHARACTERIZATION OF SILICON WITH BURIED DEFECTS
Honeycutt, J. ; Radzimski, Z. ; Kola, R. R. ; Salih, A. S. M. ; Rozgonyi, G. A.
Pub. info.: Defects in electronic materials : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.121-124,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 104
11.

Conference Proceedings
Conference Proceedings
11. INFLUENCE OF RAPID THERMAL ANNEALING OF SHALLOW BF2 IMPLATATION INTO PRE-AMORPHIZED SILICON
Maszara, W. ; Carter, C. ; Sadana, D. K. ; Liu, J. ; Ozguz, V. ; Wortman, J. ; Rozgonyi, G. A.
Pub. info.: Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.285-292,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 23
12.

Conference Proceedings
Conference Proceedings
12. GERMANIUM IMPLANTATION INTO SILICON: AN ALTERNATE PRE-AMORPHIZATION/RAPID THERMAL ANNEALING PROCEDURE FOR SHALLOW JUNCTION TECHNOLOGY
Sadana, D. K. ; Myers, E. ; Liu, J. ; Finstaad, T. ; Rozgonyi, G. A.
Pub. info.: Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.303-308,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 23
13.

Conference Proceedings
Conference Proceedings
13. DEEP LEVEL ENERGY ANALYSIS OF SURFACE AND BULK DEFECTS USING A NONCONTACT LASER/MICROWAVE PHOTOCONDUCTANCE TECHNIQUE
Buczkowski, A. ; Rozgonyi, G. A. ; Shimura, F.
Pub. info.: Photo-induced space charge effects in semiconductors: electro-optics, photoconductivity, and the photorefractive effect : symposium held April 29-May 1, 1992, San Francisco, California, U.S.A..  pp.235-240,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 261
14.

Conference Proceedings
Conference Proceedings
14. TiSi2 THIN FILMS FORMED ON CRYSTALLINE AND AMORPHOUS SILICON
Xiao, Z. G. ; Jiang, H. ; Honeycutt, J. ; Osborn, C. M. ; McGUire, G. ; Rozgonyi, G. A.
Pub. info.: Polysilicon thin films and interfaces.  pp.65-70,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 182
15.

Conference Proceedings
Conference Proceedings
15. X-RAY TOPOGRAPHY AND EBIC STUDIES OF MISFIT DISLOCATIONS IN STRAINED LAYER STRUCTURES
Hamaguchi, N. ; Humphreys, T. P. ; Parker, C. A. ; Bedair, S. M. ; Jiang, B-L. ; Radzimski, Z. J. ; Rozgonyi, G. A.
Pub. info.: Epitaxy of semiconductor layered structures : symposium held November 30-December 4, 1987, Boston, Massachusetts, U.S.A..  pp.541-546,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 102
16.

Conference Proceedings
Conference Proceedings
16. DEFECT AND DOPANT CONTROL DURING SILICON EPITAXY USING B AND Ge
Kola, R. R. ; Posthill, J. B. ; Salih, A. S. M. ; Rozgonyi, G. A. ; Bean, K. E. ; Lindberg, K.
Pub. info.: Defects in electronic materials : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.641-644,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 104
17.

Conference Proceedings
Conference Proceedings
17. INTERFACE MORPHOLOGY, NUCLEATION AND ISLAND FORMATION OF TiSi2 ON Si(111)
Jeon, Hyeongtag ; Sukow, C. A. ; Honeycutt, J. W. ; Humphreys, T. P. ; Nemanich, R. J. ; Rozgonyi, G. A.
Pub. info.: Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A..  pp.559-564,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 181
18.

Conference Proceedings
Conference Proceedings
18. INVESTIGATION OF METAL INDUCED SURFACE DEFECTS IN CZOCHRALSKI Si FOLLOWING RAPID THERMAL PROCESSING BY THERMAL WAVE MODULATED REFLECTANCE METHOD
Hahn, S. ; Smith, W. L. ; Suga, H. ; Park, J. G. ; Lim, C. S. ; Kwak, Y.-S. ; Meinecke, R. ; Kola, R. R. ; Rozgonyi, G. A. ; Kwack, K. D.
Pub. info.: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.81-88,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 224
19.

Conference Proceedings
Conference Proceedings
19. OXYGEN PRECIPITATION EFFECTS IN DEGENERATELY-DOPED SILICON
Rozgonyi, G. A. ; Pearce, C.W. ; Jacoodine, R. J.
Pub. info.: Defects in semiconductors II : symposium held November 1982 in Boston, Massachusetts, U.S.A..  pp.181-186,  1983.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 14
20.

Conference Proceedings
Conference Proceedings
20. Charge-State Defect Engineering of Silicon During Ion Implantation
Brown, R. A. ; Ravi, J. ; Erokhin, Y. ; Rozgonyi, G. A. ; White, C. W.
Pub. info.: Microstructure evolution during irradiation : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.131-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 439
21.

Conference Proceedings
Conference Proceedings
21. AGGLOMERATION-FREE NANOSCALE COBALT SILICIDE FILM FORMATION VIA SUBSTRATE PREAMORPHIZATION
Pramanick, S. ; Patnaik, B. K. ; Rozgonyi, G. A.
Pub. info.: Materials reliability in microelectronics III : symposium held April 12-15, 1993, San Francisco, California, U.S.A..  pp.475-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 309
22.

Conference Proceedings
Conference Proceedings
22. Ring-Related Defects in MCZ Wafer Comparison by Electrical, Structural, and Device Properties
Gonzalez, F. ; McQueen, M. ; Barbour, R. ; Rozgonyi, G. A.
Pub. info.: Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.119-,  1997.  Pittsburg, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 469
23.

Conference Proceedings
Conference Proceedings
23. SUPPRESSION OF SELF-INTERSTITIALS IN SILICON DURING ION IMPLANTATION VIA IN-SITU PHOTOEXCITATION
Ravi, J. ; Erokhin, Yu. ; Christensen, K. ; Rozgonyi, G. A. ; Patnaik, B. K. ; White, C. W.
Pub. info.: Microstructure of irradiated materials : Symposium held November 29-1 December, 1994, Boston, Massachusetts USA.  pp.475-,  1995.  Pittsburgh, Pa.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 373
24.

Conference Proceedings
Conference Proceedings
24. In Situ Photoexcitation-Induced Suppression of Point Defect Generation in Ion Implanted Silicon
Cho, C. R. ; Yarykin, N. ; Rozgonyi, G. A. ; Zuhr, R. A.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A..  pp.187-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 568
25.

Conference Proceedings
Conference Proceedings
25. Secondary Defect Formation and Gettering in MeV Self-Implanted Silicon
Brown, R. A. ; Kononchuk, O. ; Radzimski, Z. ; Rozgonyi, G. A. ; Gonzalez, F.
Pub. info.: Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.155-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 438
26.

Conference Proceedings
Conference Proceedings
26. Charge State Defect Engineering of Silicon During Ion Implantation
Brown, R. A. ; Ravi, J. ; Erokhin, Y. ; Rozgonyi, G. A. ; White, C. W.
Pub. info.: Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.39-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 438
27.

Conference Proceedings
Conference Proceedings
27. Secondary Defect Formation and Gettering in MeV Self-Implanted Silicon
Brown, R. A. ; Kononchuk, O. ; Radzimski, Z. ; Rozgonyi, G. A. ; Gonzalez, F.
Pub. info.: Microstructure evolution during irradiation : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.155-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 439
28.

Conference Proceedings
Conference Proceedings
28. LINEAR ZONE-MELT RECRYSTALLIZED Si FILMS USING INCOHERENT LIGHT
Xamgar, A. ; Rozgonyi, G. A. ; Knoell, R.
Pub. info.: Laser-solid interactions and transient thermal processing of materials : symposium held November 1982 in Boston, Massachusetts, U.S.A..  pp.569-574,  1983.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 13
29.

Conference Proceedings
Conference Proceedings
29. THE INFLUENCE OF AN IN-SITU ELECTRIC FIELD ON H+ AND He+ IMPLANTATION INDUCED DEFECTS IN SILICON
Ravi, J. ; Erokhin, Yu. ; Koveshnikov, S. ; Rozgonyi, G. A. ; White, C. W.
Pub. info.: Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.105-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 316
30.

Conference Proceedings
Conference Proceedings
30. Electrical and Structural Properties of MeV Si+ Ion Implantation in Silicon
Agarwal, Aditya ; Koveshnikov, S. ; Christensen, K. ; Rozgonyi, G. A.
Pub. info.: Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A..  pp.71-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 378
31.

Conference Proceedings
Conference Proceedings
31. Semiconductor Materials Defect Diagnostics for Submicrometer Very Large Scale Integration Technology
Rozgonyi, G. A. ; Sadana, D. K.
Pub. info.: Microelectronics processing : inorganic materials characterization.  pp.75-,  1986.  Washington, DC.  American Chemical Society
Title of ser.: ACS symposium series
Ser. no.: 295