1.

Conference Proceedings
Conference Proceedings
1. LAYERED POLY/AMORPHOUS SILICON DEPOSITION PROCESS FOR IMPROVED SILICIDE INTEGRITY
Roy, P.K. ; Nanda, A.K. ; Taylor, J.A.
Pub. info.: Microcrystalline semiconductors : materials science & devices : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.647-652,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 283
2.

Conference Proceedings
Conference Proceedings
2. COMPOUND SIDEWALL SPACER TECHNOLOGY FOR SUBMICRON MOSFET
Roy, P.K. ; Kook, T. ; Kizilyalli, I.C. ; Nanda, A.K.
Pub. info.: Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A..  pp.449-456,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 284
3.

Conference Proceedings
Conference Proceedings
3. Stacked Si02-Ta2O5 Gate Dielectrics for CMOS
Kizilyalli, I.C. ; Roy, P.K.
Pub. info.: Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues, proceedings of the fourth International Symposium and Thin Film Materials for Advanced Packaging Technologies : proceedings of the second International Symposium.  pp.97-103,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-7
4.

Conference Proceedings
Conference Proceedings
4. Wsi/WsiN/Poly:Si Gate CMOS Technology for 1.0 V DSPs
Kizilyalli, I. ; Radosevich, J.R. ; Merchant, S. ; Roy, P.K. ; McKinley, J. ; Kuehene, S. ; Bevk, J. ; Ashton, R. ; Singh, R. ; Vaidya, H. ; Kohler, R. ; Bocian, B. ; Freyman, R.
Pub. info.: ULSI process integration : proceedings of the first international symposium.  pp.347-352,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-18
5.

Conference Proceedings
Conference Proceedings
5. Non-Contact Characterization of Ultrathin Dielectrics for the Gigabit Era
Roy, P.K. ; Chacon, C. ; Ma, Y. ; Kizilyalli, I.C. ; Horner, O.S. ; Verkuil, R.L. ; Miller, T.G.
Pub. info.: Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.280-294,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-12
6.

Conference Proceedings
Conference Proceedings
6. COMPARISON OF VAPOR-PHASE AND WET CHEMICAL PRE-GATE OXIDE AND PRE-CONTACT CLEANS
Draper, C.W. ; Anyanwu, V.E. ; Eisenberg, J.H. ; Felton, G.J. ; Roy, P.K. ; Chittipeddi, S. ; Bechtold, P.F. ; Hagner, G. ; Cooper, D. ; Syverson, D. ; Witowski, B. ; Van Eck, B. ; Gordon, M.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.392-400,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
7.

Conference Proceedings
Conference Proceedings
7. CHARACTERIEATION OF Si/SiO2 INTERFACES USING TEM LATTICE IMAGING AND X-RAY MIc!RODIFFRACTION TECHNIQUES
Roy, P.K. ; Kannan, V.C.
Pub. info.: Characterization of the structure and chemistry of defects in materials : symposium held November 28-December 3, 1988, Boston, Massachusetts, U.S.A..  pp.367-372,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 138