Brubaker, M. ; Staffa, J. ; Roman, P. ; Fakhouri, S. ; Ruzyllo, J.
Pub. info.:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.408-414, 1997. Pennington, NJ. Electrochemical Society
Staffa, J. ; Fakhouri, S. ; Brubaker, M. ; Roman, P. ; Ruzyllo, J.
Pub. info.:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.315-321, 1997. Pennington, NJ. Electrochemical Society
Staffa, J. ; Roman, P. ; Chang, K. ; Torek, K. ; Ruzyllo, J.
Pub. info.:
Environmental, safety, and health issues in IC production : symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A.. pp.9-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society