1.
Conference Proceedings
Manakli, S. ; Trouiller, Y. ; Toublan, O. ; Schiavone, P. ; Rody, Y.F. ; Goirand, P.J.
Pub. info.:
Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA . pp.205-213, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5042
2.
Conference Proceedings
Trouiller, Y. ; Belledent, J. ; Chapon, J.D. ; Rousset, V. ; Rody, Y.F. ; Manakli, S. ; Goirand, P.-J.
Pub. info.:
Optical Microlithography XVI . Part Two pp.1231-1240, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5040
3.
Conference Proceedings
Trouiller, Y. ; Serrand, J. ; Miramond, C. ; Rody, Y.F. ; Manakli, S. ; Goirand, P.-J.
Pub. info.:
Optical Microlithography XV . Part Two pp.1522-1529, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4691
4.
Conference Proceedings
Trouiller, Y. ; Postnikov, S.V. ; Lucas, K.D. ; Sundermann, F. ; Patterson, K. ; Belledent, J. ; Couderc, C. ; Rody, Y.F.
Pub. info.:
Optical Microlithography XVII . pp.1081-1092, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5377
5.
Conference Proceedings
Belledent, J. ; Shang, S.D. ; Trouiller, Y. ; Miramond, C. ; Patterson, K. ; Toublan, O.R. ; Couderc, C. ; Sundermann, F. ; Rody, Y.F.
Pub. info.:
Optical Microlithography XVII . pp.1184-1197, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5377