1.

Conference Proceedings
Conference Proceedings
1. Using the CODE technique to print complex two-dimensional structures in a 90-nm ground rule process
Manakli, S. ; Trouiller, Y. ; Toublan, O. ; Schiavone, P. ; Rody, Y.F. ; Goirand, P.J.
Pub. info.: Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA.  pp.205-213,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5042
2.

Conference Proceedings
Conference Proceedings
2. Gate imaging for 0.09-μm logic technology: comparison of single exposure with assist bars and the CODE approach
Trouiller, Y. ; Belledent, J. ; Chapon, J.D. ; Rousset, V. ; Rody, Y.F. ; Manakli, S. ; Goirand, P.-J.
Pub. info.: Optical Microlithography XVI.  Part Two  pp.1231-1240,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
3.

Conference Proceedings
Conference Proceedings
3. Complementary double-exposure technique (CODE): a way to print 80-nm gate level using a double-exposure binary mask approach
Manakli, S. ; Trouiller. Y. ; Toublan, O. ; Schiavone, P. ; Miramond, C. ; Rody, Y.F. ; Sundermann, F. ; Chapon, J.D. ; Goirand, P.-J.
Pub. info.: Optical Microlithography XV.  Part One  pp.491-502,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
4.

Conference Proceedings
Conference Proceedings
4. ArF imaging with off-axis illumination and subresolution asist bars: a compromise between mask constraints an lithographic process constraints
Trouiller, Y. ; Serrand, J. ; Miramond, C. ; Rody, Y.F. ; Manakli, S. ; Goirand, P.-J.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1522-1529,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691