1.
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Conference Proceedings
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Trouiller, Y. ; Belledent, J. ; Chapon, J.D. ; Rousset, V. ; Rody, Y.F. ; Manakli, S. ; Goirand, P.-J.
Pub. info.: |
Optical Microlithography XVI. Part Two pp.1231-1240, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5040 |
|
2.
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Conference Proceedings
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Manakli, S. ; Trouiller. Y. ; Toublan, O. ; Schiavone, P. ; Miramond, C. ; Rody, Y.F. ; Sundermann, F. ; Chapon, J.D. ; Goirand, P.-J.
Pub. info.: |
Optical Microlithography XV. Part One pp.491-502, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4691 |
|
3.
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Conference Proceedings
|
Trouiller, Y. ; Serrand, J. ; Miramond, C. ; Rody, Y.F. ; Manakli, S. ; Goirand, P.-J.
Pub. info.: |
Optical Microlithography XV. Part Two pp.1522-1529, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4691 |
|