1.

Conference Proceedings
Conference Proceedings
1. Electrical Characterization of 1 KeV He-, Ne-, and Ar-Ion Bombarded n-Si Using Deep Level Transient Spectroscopy
Deenapanray, P. N. K. ; Auret, F. D. ; Ridgway, M. C. ; Goodman, S. A. ; Myburg, G.
Pub. info.: Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.519-,  1998.  Warrendale, Pa.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 510
2.

Conference Proceedings
Conference Proceedings
2. Electronic Properties of Defects Formed in n-Si During Sputter-Etching in an Ar Plasma
Deenapanray, P. N. K. ; Auret, F. D. ; Schutte, C. ; Myburg, G. ; Meyer, W. E. ; Malherbe, J. B. ; Ridgway, M. C.
Pub. info.: Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.87-,  1997.  Pittsburgh, Penn.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 442