1.

Conference Proceedings
Conference Proceedings
1. 5 Cleaning Optimization for Reduced Chemical Usage
Resnick, P.J. ; Simonson, R.J. ; Nelson, G.C. ; Matlock, C.A. ; Kelly, M.J.
Pub. info.: Proceedings of the Symposium on Environmental Aspects of Electrochemical Technology: applications in electronics.  pp.57-67,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-21
2.

Conference Proceedings
Conference Proceedings
2. A STUDY OF LIGHT POINT DEFECT REMOVAL BY SC-1 CHEMISTRIES
Resnick, P.J. ; Adkins, C.L.J. ; Matlock, C.A. ; Kelly, M.J. ; Clews, P.J. ; Korbe, N.C.
Pub. info.: Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.589-596,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-20