1.

Conference Proceedings
Conference Proceedings
1. Silicon Oxide Sacrificial Layer for MEMS Applications
Biasotto, C. ; Boscoli, F. A. ; Teixeira, R. C. ; Ramos, A. C. S. ; Diniz, J. A. ; Daltrini, A. M. ; Moshkalyov, S. A. ; Doi, I.
Pub. info.: Microelectronics technology and devices : SBMICRO 2005 : proceedings of the twentieth international symposium.  pp.389-397,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-08
2.

Conference Proceedings
Conference Proceedings
2. Suspended Membranes Made by Silicon Nitride Deposited by ECR-CVD
Biasotto, C. ; Monte, B. ; Neli, R. R. ; Ramos, A. C. S. ; Diniz, J. A. ; Moshkalyov, S.A. ; Doi, I. ; Swart, J. W.
Pub. info.: Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium.  pp.119-124,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-03
3.

Conference Proceedings
Conference Proceedings
3. ECR-CCD SiNx Passivation in GaAs-Based Devices
Zoccal, L. B. ; Diniz, J. A. ; Ramos, A. C. S.
Pub. info.: Microelectronics technology and devices : SBMICRO 2005 : proceedings of the twentieth international symposium.  pp.145-152,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-08