Walecki, W.J. ; Lai, K. ; Pravdivtsev, A. ; Souchkov, V. ; Van, P. ; Azfar, T. ; Wong, T. ; Lau, S.H. ; Koo, A.
Pub. info.:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV. pp.182-188, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering