Poortmans, J. ; Rosmeulen, M. ; Kaniava, A. ; Vanhellemont, J. ; Elgamel, H. ; Nijs, J.
Pub. info.:
Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A.. pp.399-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Kaniava, A. ; Menczigar, U. ; Vanhellemont, J. ; Poortmans, J. ; Rotondaro, A. L. P. ; Gaubas, E. ; Vaitkus, J. ; Koster, L. ; Graf, D.
Pub. info.:
Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA. pp.389-, 1995. Pittsburgh, PA. MRS - Materials Research Society