1.

Conference Proceedings
Conference Proceedings
1. Heating and Convection in Copper Polishing
Borucki, L. ; Li, Z. ; Philipossian, A.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.61-67,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-21
2.

Conference Proceedings
Conference Proceedings
2. Analysis of Frictional Heating of Grooved and Flat CMP Polishing Pads
Borucki, L. ; Charns, L. ; Philipossian, A.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.173-181,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-21