1.

Conference Proceedings
Conference Proceedings
1. Patterning of GaN in High-Density Cl2- and BCl3-Based Plasmas
Shul, R. J. ; Briggs, R. D. ; Han, J. ; Pearton, S. J. ; Lee, J. W. ; Vartuli, C. B. ; Killeen, K. P. ; Ludowise, M. J.
Pub. info.: Gallium nitride and related materials II : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.355-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 468
2.

Conference Proceedings
Conference Proceedings
2. Cl2-Based Dry Etching of the AlGalnN System in Inductively-Coupled Plasmas
Cho, Hyun ; Vartuli, C. B. ; Abernathy, C. R. ; Donovan, S. M. ; Pearton, S. J. ; Shul, R. J. ; Han, J.
Pub. info.: Power semiconductor materials and devices : symposium held December 1-4, 1997, Boston, Massachusetts, U.S.A..  pp.327-,  1998.  Warrendale, Penn..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 483