1.

Conference Proceedings
Conference Proceedings
1. Photoelectrochemical Etching of InxGa1-xN
Cho, H. ; Donovan, S. M. ; Abernathy, C. R. ; Pearton, S. J. ; Ren, F. ; Han, J. ; Shul, R. J.
Pub. info.: GaN and related alloys : symposium held November 30-December 4, 1998, Boston, Massachusetts, U.S.A..  pp.G6.40.1-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 537
2.

Conference Proceedings
Conference Proceedings
2. Inductively Coupled Plasma Etching of III-Nitrides in Cl2/Xe, Cl2/Ar and Cl2/He
Cho, H. ; Hahn, Y. B. ; Hays, D. C. ; Jung, K. B. ; Donovan, S. M. ; Abernathy, C. R. ; Pearton, S. J. ; Shul, R. J.
Pub. info.: GaN and related alloys : symposium held November 30-December 4, 1998, Boston, Massachusetts, U.S.A..  pp.G6.56.1-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 537