1.

Conference Proceedings
Conference Proceedings
1. Plasma Chemistries for Dry Etching GaN, AlN, InGaN and InAlN
Pearton, S. J. ; Vartuli, C. B. ; Lee, J. W. ; Donovan, S. M. ; MacKenzie, J. D. ; Abernathy, C. R. ; Shul, R. J. ; McLane, G. F. ; Ren, F.
Pub. info.: Compound semiconductor electronics and photonics : symposium held April 8-10, 1996, San Francisco, California, U.S.A..  pp.309-,  1996.  Pittsburgh, Penn.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 421
2.

Conference Proceedings
Conference Proceedings
2. Dry Etching of III-V Nitrides
Pearton, S. J. ; Shul, R. J. ; McLane, G. F. ; Constantine, C.
Pub. info.: Gallium nitride and related materials : the First International Symposium on Gallium Nitride and Related Materials held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.717-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 395