1.

Conference Proceedings
Conference Proceedings
1. Planarization approaches to via-first dual-damascene processing
Pavelchek,E.K. ; Cernigliaro,M. ; Trefonas,P. ; doCanto,M.
Pub. info.: Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA.  pp.140-151,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4181
2.

Conference Proceedings
Conference Proceedings
2. Planarizing ARs for dual-damascene processing
Pavelchek,E.K. ; Cernigliaro,M. ; Trefonas,P. ; Kwok,A. ; Coley,S.
Pub. info.: Advances in Resist Technology and Processing XVIII.  4345  pp.864-872,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4345