1.

Conference Proceedings
Conference Proceedings
1. THE EFFECT OF POLYSILICON DEPOSITION AND DOPING PROCESSES ON DOUBLE-POLY CAPACITORS-ELECTRICAL AND AFM EVALUATION
Paulson, W. M. ; Breaux, L. H. ; Hegde, R. I. ; Tobin, P. J.
Pub. info.: Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.397-,  1994.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 324
2.

Conference Proceedings
Conference Proceedings
2. NUCLEATION AND GROWTH OF CVD Si THIN FILMS: AFM, SE AND TEM ANALYSIS
Paulson, W. M. ; Hegde, R. I. ; Doris, B. B. ; Kaushik, V. ; Tobin, P. J. ; Fitch, J. ; McGahan, W. A. ; Woollam, J. A.
Pub. info.: Evolution of thin film and surface structure and morphology : symposium held November 28-December 2, 1994, Boston, Massachusetts, USA.  pp.77-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 355
3.

Conference Proceedings
Conference Proceedings
3. Performance and Reliability of Scaled Gate Dielectrics
Paulson, W. M. ; Tobin, P. J. ; Tseng, H-H. ; Maiti, B. ; Gelatos, C. ; Hegde, R. I. ; Anderson, S. G. H.
Pub. info.: Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A..  pp.77-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 473