Yi, S.W. ; Lee, S.K. ; Kong, H.J. ; Yang, D.-Y. ; Park, S. ; Lim, T. ; Kim, R.H. ; Lee, K.-S.
Pub. info.:
Micromachining and Microfabrication Process Technology IX. pp.137-145, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering