Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics. pp.220-222, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Shin, J. ; Choi, J. ; Park, S. ; Lee, J. ; Yoo, M. ; Kong, J.
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Photomask and Next-Generation Lithography Mask Technology XIII. pp.628339-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering