1.
Conference Proceedings
Lee, G.S. ; Kwack, K.D. ; Park, J.G. ; Park, J.M. ; Shim, T.H.
Pub. info.:
ULSI process integration : proceedings of the first international symposium . pp.255-266, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-18
2.
Conference Proceedings
Park, J.G. ; Lee, G.S. ; Park, J.M. ; Chon, S.M. ; Chung, H.K.
Pub. info.:
Proceedings of the Third International Symposium on Defects in Silicon . pp.324-341, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-1
3.
Conference Proceedings
Park, J.G. ; Park, H.P. ; Lee, G.S. ; Kwack, K.D. ; Ryu, K.B. ; Park, J.M.
Pub. info.:
ULSI process integration : proceedings of the first international symposium . pp.157-166, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-18
4.
Conference Proceedings
Park, J.G. ; Park, J.M. ; Cho, K.C. ; Lee, G.S. ; Chung, H.K.
Pub. info.:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II . pp.173-195, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
97-22