1.

Conference Proceedings
Conference Proceedings
1. COP Induced Isolation Failures in Cz Wafers
Lee, G.S. ; Kwack, K.D. ; Park, J.G. ; Park, J.M. ; Shim, T.H.
Pub. info.: ULSI process integration : proceedings of the first international symposium.  pp.255-266,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-18
2.

Conference Proceedings
Conference Proceedings
2. Effect of High Temperature RTA on Precipitate Formation and the COP Dissolution
Park, J.G. ; Park, H.P. ; Lee, G.S. ; Kwack, K.D. ; Ryu, K.B. ; Park, J.M.
Pub. info.: ULSI process integration : proceedings of the first international symposium.  pp.157-166,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-18