Park, J-G. ; Kirk, H. ; Cho, K-C. ; Lee, H-K. ; Lee, C-S. ; Rozgonyi, G.A.
Pub. info.:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.370-378, 1994. Pennington, NJ. Electrochemical Society
Park, J-G. ; Kirk, H. ; Lee, C-S. ; Lee, H-K. ; Lee, D-M. ; Rozgonyi, G.A.
Pub. info.:
Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects. pp.57-71, 1994. Pennington, NJ. Electrochemical Society