1.

Conference Proceedings
Conference Proceedings
1. Implementation of contact hole patterning performance with KrF resist flow process for 60nm node DRAM application [6154-155]
Kim, H. ; Ahn, Y. B. ; Kim, J. ; Kim, S. ; Park, D. ; Kim, Y. -S.
Pub. info.: Optical Microlithography XIX.  pp.615441-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
2.

Conference Proceedings
Conference Proceedings
2. 3D medical data visualization using SVG
Kim, S. ; Park, D. ; Gwun, O. ; Lee, K.
Pub. info.: Internet Imaging VI.  pp.12-22,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5670