1.

Technical Paper

Technical Paper
Park, C. ; Kim, C. ; Choi, K. ; Kang, K.
Pub. info.: 2007 International Fuels and Lubricants Meeting : SAE technical paper.  2007.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2007
2.

Conference Proceedings

Conference Proceedings
Hong, J. ; Woo, C. ; Park, J. ; Cho, B. ; Choi, J.-S. ; Yang, H. ; Park, C. ; Shin, Y.-C. ; Kim, Y. ; Jeong, G. ; Kim, J. ; Kang, K. ; Kang, C. ; Yim, D. ; Song, Y.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.406-414,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038