1.

Conference Proceedings
Conference Proceedings
1. Auxiliary pattern for cell-based OPC [6349-185]
Kahng, A. B. ; Park, C.
Pub. info.: Photomask Technology 2006.  pp.63494S-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
2.

Conference Proceedings
Conference Proceedings
2. Modeling OPC complexity for design for manufacturability [5992-69]
Gupta, P. ; Kahng, A. B. ; Muddu, S. ; Nakagawa, S. ; Park, C.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59921W-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992