1.

Conference Proceedings
Conference Proceedings
1. DEPENDENCE OF PROFILES OF ARSENIC IMPLANTED INTO SILICON ON TILT AND ROTATION ANGLES
Yang, S. ; Park, C. ; Klein, K. ; Gupta, P. ; Tasch, A. ; Simonton, R. ; Lux, G. ; McGee, C.
Pub. info.: Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A..  pp.197-202,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 235
2.

Conference Proceedings
Conference Proceedings
2. Modeling OPC complexity for design for manufacturability [5992-69]
Gupta, P. ; Kahng, A. B. ; Muddu, S. ; Nakagawa, S. ; Park, C.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59921W-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992