1.
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Conference Proceedings
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Koo,S.-S. ; Kim,S.-J. ; Paek,S.-W. ; Ahn,C.-N. ; Ham,Y.-M. ; Shin,K.-S.
Pub. info.: |
Optical Microlithography XIV. 4346 pp.770-777, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4346 |
|
2.
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Conference Proceedings
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Koo,S.-S. ; Kim,H.-B. ; Yune,H.-S. ; Hong,J.-S. ; Paek,S.-W. ; Eom,T.-S. ; Ahn,C.-N. ; Ham,Y.-M. ; Baik,K.-H. ; Lee,K.-Y. ; Kim,L.-J. ; Kim,H.-S.
Pub. info.: |
20th Annual BACUS Symposium on Photomask Technology. pp.346-358, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4186 |
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