1.

Conference Proceedings
Conference Proceedings
1. Design process optimization, virtual prototyping of manufacturing, and foundry-portable DFM(Invited Paper)
Hogan, J. ; Progler, C. ; Chatila, A. ; Bruggeman, B. ; Heins, M. ; Pack, R. ; Boksha, V.
Pub. info.: Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA.  pp.21-38,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5756
2.

Conference Proceedings
Conference Proceedings
2. Mask design rules (45 nm): time for standardization [5992-13]
Mason, M. ; Progler, C. J. ; Martin, P. ; Ham, Y. -M. ; Dillon, B. ; Pack, R. ; Heins, M. ; Gookassian, J. ; Garcia, J. ; Boksha, V.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59920D-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992