1.
|
Conference Proceedings
|
Tejada, F. ; Wesolek, D.M. ; Lehtonen, J. ; Miragliotta, J.A. ; Andreou, A.G. ; Osiander, R.
Pub. info.: |
MOEMS and Miniaturized Systems IV. pp.27-36, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5346 |
|
2.
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Conference Proceedings
|
Wesolek, D.M. ; Champion, J.L. ; Herrero, F.A. ; Osiander, R. ; Champion, R.L. ; Darrin, A.M.
Pub. info.: |
MEMS/MOEMS Components and Their Applications. pp.89-97, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5344 |
|