1.

Conference Proceedings

Conference Proceedings
Kistenmacher, T. J. ; Osiander, R. ; Ecelberger, S. A. ; Givens, R. B. ; Wickenden, D. K. ; Murphy, J. C.
Pub. info.: Materials for mechanical and optical microsystems : symposium held December 4-5, 1996, Boston, Massachusetts,U.S.A..  pp.75-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 444
2.

Conference Proceedings

Conference Proceedings
Lamb, J. L. ; Wichenden, D. K. ; Champion, J. L. ; Givens, R. B. ; Osiander, R. ; Kistenmacher, T. J.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.211-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 605