1.

Conference Proceedings
Conference Proceedings
1. Growth of Si/SipxGex/Si Heterostructure by Ultraclean Low Temperature LPCVD
Maeda, T. ; Murota, J. ; Sakamoto, K. ; Aizawa, K. ; Ushioda, S. ; Ono, S.
Pub. info.: Proceedings of the Twelfth International Symposium on Chemical Vapor Deposition.  pp.127-133,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-2
2.

Conference Proceedings
Conference Proceedings
2. Comparison of Polysilicon Etching between Pure and Nitrogen Added Chlorine ECR Plasmas
Matsuura, T. ; Murota, J. ; Ono, S. ; Ohmi, T.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.141-148,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21
3.

Conference Proceedings
Conference Proceedings
3. Atomic Layer Growth of Si in Flash Heating CVD Using SiH4 Gas
Sakuraba, M. ; Murota, J. ; Ono, S.
Pub. info.: Proceedings of the Twelfth International Symposium on Chemical Vapor Deposition.  pp.110-116,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-2