1.
Conference Proceedings
Fields,C.H. ; Ray-Chaudhuri,A.K. ; Krenz,K.D. ; Oldham,W.G. ; Stulen,R.H.
Pub. info.:
Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California . pp.356-367, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3048
2.
Conference Proceedings
Schenker,R.E. ; Piao,F. ; Oldham,W.G.
Pub. info.:
Optical Microlithography IX . Part2 pp.698-706, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2726
3.
Conference Proceedings
Piao,F. ; Schenker,R.E. ; Oldham,W.G.
Pub. info.:
Optical Microlithography X . pp.907-912, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3051
4.
Conference Proceedings
Schenker,R.E. ; Piao,F. ; Oldham,W.G.
Pub. info.:
Optical Microlithography X . pp.44-53, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3051