1.
|
Conference Proceedings
|
Schenker,R.E. ; Piao,F. ; Oldham,W.G.
Pub. info.: |
Optical Microlithography IX. Part2 pp.698-706, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
2726 |
|
2.
|
Conference Proceedings
|
Piao,F. ; Schenker,R.E. ; Oldham,W.G.
Pub. info.: |
Optical Microlithography X. pp.907-912, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
3051 |
|
3.
|
Conference Proceedings
|
Schenker,R.E. ; Piao,F. ; Oldham,W.G.
Pub. info.: |
Optical Microlithography X. pp.44-53, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
3051 |
|