1.

Conference Proceedings
Conference Proceedings
1. Modifications to thermophysical Behavior in ultrathin polymer films
D'Amour, J.N. ; Frank, C.W. ; Okoroanyanwu, U.
Pub. info.: Advances in Resist Technology and Processing XX.  2  pp.996-1007,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039
2.

Conference Proceedings
Conference Proceedings
2. Measuring thermophysical properties of ultrathin photoresist films
D'Amour, J.N. ; Frank, C.W. ; Okoroanyanwu, U.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part Two  pp.936-942,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690