1.

Conference Proceedings
Conference Proceedings
1. *MICROFABRICATION TECHNOLOGIES FOR ADVANCED VLSI DEVICES
Horiike, Y. ; Yoshikawa, R. ; Okano, H. ; Nakase, M. ; Komano, H. ; Takigawa, T.
Pub. info.: Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.17-26,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 75
2.

Conference Proceedings
Conference Proceedings
2. SINGLE-CRYSTAL SOLUTION SILICON ETCHING CHARACTERISTICS USING EXCIMER LASER Cl2 GAS
Arikado, T. ; Sekine, M. ; Okano, H. ; Horiike, Y.
Pub. info.: Laser-controlled chemical processing of surfaces : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.167-172,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 29
3.

Conference Proceedings
Conference Proceedings
3. *MICROFABRICATION TECHNOLOGIES FOR ADVANCED VLSI DEVICES
Horiike, Y. ; Yoshikawa, R. ; Okano, H. ; Nakase, M. ; Komano, H. ; Takigawa, T.
Pub. info.: Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A..  pp.39-48,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 76