1.

Conference Proceedings

Conference Proceedings
Okada, T. ; Okamoto, K. ; Ochi, K. ; Higashimine, K. ; Kimoto, T.
Pub. info.: Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005.  pp.399-402,  2006.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 527-529
2.

Conference Proceedings

Conference Proceedings
Tomita, T. ; Matsuo, S. ; Okada, T. ; Kimoto, T. ; Mitani, T. ; Nakashima, S.
Pub. info.: Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005.  pp.339-342,  2006.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 527-529
3.

Conference Proceedings

Conference Proceedings
Nakata, Y. ; Hartanto, A.B. ; Kawakami, M. ; Okada, T. ; Maeda, M.
Pub. info.: Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan.  pp.238-243,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4830
4.

Conference Proceedings

Conference Proceedings
Nakata, Y. ; Gunji, S. ; Shimizu, Y. ; Okada, T. ; Maeda, M.
Pub. info.: Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan.  pp.260-264,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4830
5.

Conference Proceedings

Conference Proceedings
Nakata, Y. ; Okada, T. ; Maeda, M.
Pub. info.: Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan.  pp.488-491,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4830
6.

Conference Proceedings

Conference Proceedings
Nakata, Y. ; Okada, T. ; Maeda, M.
Pub. info.: Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan.  pp.749-754,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5662
7.

Conference Proceedings

Conference Proceedings
Mizuno, Y. ; Tanaka, A. ; Tonda, H. ; Takakuwa, Y. ; Takahiro, K. ; Ishikawa, K. ; Takano, T. ; Ikeuch, T. ; Okada, T. ; Yamaguchi, S. ; Homma, T.
Pub. info.: High temperature corrosion and materials chemistry : proceedings of the Per Kofstad Memorial Symposium.  pp.153-165,  1999.  Pennington, New Jersey.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-38
8.

Conference Proceedings

Conference Proceedings
Okada, T. ; Yoshida, N. ; Etoh, K. ; Nunokawa, I. ; Fuyama, M. ; Kawabe, T.
Pub. info.: Magnetic Materials, Processes, and Devices VI, Applications to Storage and Microelectromechanical Systems (MEMS) : proceedings of the International Symposium.  pp.348-358,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-29
9.

Conference Proceedings

Conference Proceedings
Meng, Z. ; Nagamatsu, K. ; Higashihata, M. ; Nakata, Y. ; Okada, T. ; Kubota, Y. ; Nishimura, N. ; Teshima, T.
Pub. info.: Materials and devices for optical and wireless communications : APOC 2002 : Asia-Pacific Optical and Wireless Communications : 15-18 October, 2002, Shanghai, China.  pp.343-354,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4905
10.

Conference Proceedings

Conference Proceedings
Kurisu, K. ; Okada, T. ; Ebata, K.
Pub. info.: Micromachining technology for micro-optics and nano-optics II : 27-29 January 2004, San Jose, California, USA.  pp.54-61,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5347
11.

Conference Proceedings

Conference Proceedings
Okada, T.
Pub. info.: Lasers in materials science.  pp.95-122,  1999.  Zurich-Uetikon, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 301
12.

Conference Proceedings

Conference Proceedings
Mori, Y. ; Sivazlian, F. ; Yagi, H. ; Show, Y. ; Deguchi, M. ; Yagyu, H. ; Eimori, N. ; Okada, T. ; Hatta, A. ; Nishimura, K. ; Kitabatake, M. ; Ito, T. ; Hirao, T. ; Izumi, T. ; Sasaki, T. ; Hiraki, A.
Pub. info.: Proceedings of the Third International Symposium on Diamond Materials.  pp.706-712,  1993.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-17
13.

Conference Proceedings

Conference Proceedings
Okada, T. ; Komuro, M. ; Fuyama, M. ; Kawabe, T.
Pub. info.: Proceedings of the Fifth International Sympposium on Magnetic Materials, Processes, and Devices : applications to storage and microelectromechanical systems (MEMS).  pp.123-130,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-20
14.

Conference Proceedings

Conference Proceedings
Nakata, Y. ; Okada, T. ; Maeda, M.
Pub. info.: Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany.  pp.358-361,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5063
15.

Conference Proceedings

Conference Proceedings
Okada, T. ; Andreev, A.A. ; Toraya, S. ; Kitada, T.
Pub. info.: ECLIM 2002 : 27th European Conference on Laser Interaction with Matter : 7-11 October 2002, Moscow, Russia.  pp.333-344,  2003.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5228
16.

Conference Proceedings

Conference Proceedings
Imahori, H. ; Tamaki, K. ; Yamada, H. ; Sakata, Y. ; Nishimura, Y. ; Yamazaki, I. ; Shimomura, A. ; Okada, T.
Pub. info.: Recent Advances in the Chemistry and Physics of Fullerenes and Related Materials : proceedings of the twelfth International Symposium.  pp.286-295,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-12
17.

Conference Proceedings

Conference Proceedings
Muraoka, K. ; Uchino, K. ; Kajiwara, T. ; Matsuo, K. ; Matsuda, Y. ; Kim, H. ; Maeda, M. ; Okada, T. ; Honda, C. ; Akazaki, M.
Pub. info.: Process diagnostics : materials, combustion, fusion : symposium held April 5-7, 1988, Reno, Nevada, U.S.A..  pp.257-262,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 117
18.

Conference Proceedings

Conference Proceedings
Hirai, T. ; Fuse, K. ; Shiozaki, M. ; Ebata, K. ; Okada, T. ; Namba, H.
Pub. info.: First International Symposium on High-Power Laser Macroprocessing : 27-31 May 2002, Osaka, Japan.  pp.142-147,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4831
19.

Conference Proceedings

Conference Proceedings
Mori, K. ; Tanaka, Y. ; Furuya, S. ; Okada, T. ; Komatsuzaki, K. ; Nishi, Y.
Pub. info.: Materials for smart systems II : sympsoium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.381-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 459
20.

Conference Proceedings

Conference Proceedings
Nishijima, S. ; Hussain, M. ; Nakahira, A. ; Okada, T. ; Niihara, K.
Pub. info.: Better ceramics through chemistry VII : organic/inorganic hybrid materials : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.243-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 435
21.

Conference Proceedings

Conference Proceedings
Hussain, M. ; Nishijima, S. ; Nakahira, A. ; Okada, T. ; Niihara, K.
Pub. info.: Better ceramics through chemistry VII : organic/inorganic hybrid materials : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.369-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 435
22.

Conference Proceedings

Conference Proceedings
Okada, T. ; Nakamura, T. ; Mitsugi, K. ; Kozawa, K. ; Matumura, T. ; Ishii, H. ; Ozu, Y. ; Oguri, K. ; Nishi, Y.
Pub. info.: Quasicrystals : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A..  pp.507-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 553
23.

Conference Proceedings

Conference Proceedings
Mori, K. ; Okada, T. ; Oguri, K. ; Nishi, Y.
Pub. info.: Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A..  pp.365-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 477
24.

Conference Proceedings

Conference Proceedings
Kutsuna, M. ; Shido, K. ; Okada, T.
Pub. info.: First International Symposium on High-Power Laser Macroprocessing : 27-31 May 2002, Osaka, Japan.  pp.230-234,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4831
25.

Conference Proceedings

Conference Proceedings
Yamamoto, K. ; Shimono, T. ; Okada, T. ; Kawazawa, Y. ; Tatsuno, T.
Pub. info.: ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology.  pp.398-409,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-5
26.

Conference Proceedings

Conference Proceedings
Tanaka, H. ; Akinaga, K. ; Takahashi, A. ; Okada, T.
Pub. info.: Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan.  pp.361-366,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5662
27.

Conference Proceedings

Conference Proceedings
Okada, T. ; Kawashima, K.
Pub. info.: Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan.  pp.420-425,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5662
28.

Conference Proceedings

Conference Proceedings
Okada, T. ; Kaneko, T. ; Hatakeyama, R. ; Tohji, K.
Pub. info.: Fullerenes and nanotubes, materials for the new chemical frontier : proceedings of the International Symposium on Fullerenes, Nanotubes, and Carbon Nanoclusters.  pp.160-167,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-12
29.

Conference Proceedings

Conference Proceedings
Iso, K. ; Okada, T.
Pub. info.: Proceedings of the International Conference on Colloid and Surface Science, Tokyo, Japan, November 5-8, 2000 : 25th Anniversary of the Division of Colloid and Surface Chemistry, the Chemical Society of Japan.  pp.117-120,  2001.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 132
30.

Conference Proceedings

Conference Proceedings
Harada, M. ; Okada, T. ; Watanabe, I.
Pub. info.: Proceedings of the International Conference on Colloid and Surface Science, Tokyo, Japan, November 5-8, 2000 : 25th Anniversary of the Division of Colloid and Surface Chemistry, the Chemical Society of Japan.  pp.121-124,  2001.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 132
31.

Conference Proceedings

Conference Proceedings
Iwahara, H. ; Hibino, T. ; Okada, T.
Pub. info.: Proceedings of the Second International Symposium on Ionic and Mixed Conducting Ceramics.  pp.1-8,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-12
32.

Conference Proceedings

Conference Proceedings
Inoko, F. ; Kashihara, K. ; Tagami, M. ; Okada, T.
Pub. info.: Recrystallization and grain growth : SF2M : proceedings of the second Joint International Conference on Recrystallization and Grain Growth, ReX & GG2, SF2M, held in Annecy, France, 30th August - 3rd September 2004.  pp.57-62,  2004.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 467-470
33.

Conference Proceedings

Conference Proceedings
Okada, T. ; Kimoto, T. ; Yamai, K. ; Matsunami, H. ; Inoko, F.
Pub. info.: Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003.  pp.521-524,  2004.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 457-460
34.

Conference Proceedings

Conference Proceedings
Ambe, F. ; Ambe, S. ; Okada, T. ; Sekizawa, H.
Pub. info.: Geochemical processes at mineral surfaces.  pp.403-,  1986.  Washington, DC.  American Chemical Society
Title of ser.: ACS symposium series
Ser. no.: 323
35.

Conference Proceedings

Conference Proceedings
Tazuke, S. ; Matoba, T. ; Kimura, H. ; Okada, T.
Pub. info.: Modification of polymers.  pp.217-,  1980.  Washington, D.C..  American Chemical Society
Title of ser.: ACS symposium series
Ser. no.: 121
36.

Conference Proceedings

Conference Proceedings
Okada, T. ; Matsumoto, S. ; Nanba, T. ; Miura, Y.
Pub. info.: International symposium on photonic glass (ISPG 2002) : 14-17 October 2002, Shanghai, China.  pp.65-69,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5061
37.

Conference Proceedings

Conference Proceedings
Fuse, K. ; Okada, T. ; Ebata, K.
Pub. info.: Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan.  pp.95-100,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4830
38.

Conference Proceedings

Conference Proceedings
Okada, T. ; Nakata, Y. ; Maeda, M.
Pub. info.: Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan.  pp.119-125,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4830
39.

Conference Proceedings

Conference Proceedings
Kurisu, K. ; Hirai, T. ; Ushiro, T. ; Fuse, K. ; Okada, T. ; Ebata, K.
Pub. info.: Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan.  pp.313-318,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4830
40.

Technical Paper

Technical Paper
Okada, T. ; Tazawa, H.
Pub. info.: NASA Technical Reports.  pp.1-14,  1992.  National Aeronautics and Space Adminstration
41.

Technical Paper

Technical Paper
Kurita, M. ; Okada, T. ; Nakamura, Y.
Pub. info.: AIAA paper.  2001.  Reston, VA.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : International Space Planes and Hypersonic Systems and Technologies Conference
Ser. no.: 2001
42.

Technical Paper

Technical Paper
Yamaoka, S. ; Kakuya, H. ; Nakagawa, S. ; Okada, T. ; Shimada, A.
Pub. info.: 2005 SAE world congress : technical paper.  2005.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2005
43.

Technical Paper

Technical Paper
Okada, T. ; Miwata, Y. ; Ishii, H.
Pub. info.: 2003 SAE world congress : technical paper.  2003.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2003
44.

Technical Paper

Technical Paper
Okada, T. ; Shiomi, K. ; Ikeno, T. ; Taro, T. ; Okuma, M.
Pub. info.: 2006 Small Engine Technology Conference and Exhibition : SAE technical paper.  2006.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2006
45.

Technical Paper

Technical Paper
Morita, K. ; Sekine, M. ; Tsukada, Y. ; Okada, T. ; Toyofuku, Y.
Pub. info.: 14th Asia Pacific Automotive Engineering Conference : SAE technical paper.  2007.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2007
46.

Technical Paper

Technical Paper
Ishimaru, M. ; Okada, T. ; Ohashi, A.
Pub. info.: 2005 Small Engine Technology Conference and Exhibition : SAE technical paper.  2005.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2005
47.

Conference Proceedings

Conference Proceedings
Tanaka, H. ; Akinaga, K. ; Takahashi, A. ; Okada, T.
Pub. info.: Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan.  pp.313-318,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5662
48.

Conference Proceedings

Conference Proceedings
Okada, T. ; Minemura, M. ; Takahashi, K. ; Sakurai, M. ; Akutagawa, S.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.423-430,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
49.

Conference Proceedings

Conference Proceedings
Okada, T. ; Kawakami, M. ; Hartanto, A.B. ; Nakata, Y.
Pub. info.: Photon Processing in Microelectronics and Photonics II.  pp.362-368,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4977
50.

Conference Proceedings

Conference Proceedings
Nakata, Y. ; Okada, T. ; Maeda, M.
Pub. info.: Photon Processing in Microelectronics and Photonics.  pp.435-444,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4637
51.

Conference Proceedings

Conference Proceedings
Nakata, Y. ; Okada, T. ; Maeda, M.
Pub. info.: Photon Processing in Microelectronics and Photonics II.  pp.168-179,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4977
52.

Conference Proceedings

Conference Proceedings
Nakata, Y. ; Okada, T. ; Maeda, M.
Pub. info.: Laser-Assisted Micro- and Nanotechnologies 2003.  pp.147-155,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5399
53.

Conference Proceedings

Conference Proceedings
Nakata, Y. ; Okada, T. ; Maeda, M.
Pub. info.: Laser-Assisted Micro- and Nanotechnologies 2003.  pp.156-170,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5399
54.

Conference Proceedings

Conference Proceedings
Tanaka, H. ; Akinaga, K. ; Takahashi, A. ; Okada, T.
Pub. info.: High-Power Laser Ablation V.  pp.737-748,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5448
55.

Conference Proceedings

Conference Proceedings
Okada, T. ; Kawashima, K. ; Nakata, Y.
Pub. info.: High-Power Laser Ablation V.  pp.1009-1016,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5448
56.

Conference Proceedings

Conference Proceedings
Okada, T. ; Hartanto, A.B. ; Nakata, Y.
Pub. info.: Photon Processing in Microelectronics and Photonics III.  pp.357-364,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5339
57.

Conference Proceedings

Conference Proceedings
Nakata, Y. ; Okada, T. ; Maeda, M.
Pub. info.: Photon Processing in Microelectronics and Photonics III.  pp.9-19,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5339
58.

Conference Proceedings

Conference Proceedings
Okada, T. ; Nakata, Y. ; Maeda, M.
Pub. info.: Photon Processing in Microelectronics and Photonics.  pp.21-30,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4637
59.

Conference Proceedings

Conference Proceedings
Tabara, K. ; Sakurai, M. ; Makino, S. ; Itoh, T. ; Okada, T.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.619-625,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853
60.

Conference Proceedings

Conference Proceedings
Okada, T. ; Kawashima, K. ; Ueda, M. ; Nakata, Y.
Pub. info.: Photon Processing in Microelectronics and Photonics IV.  pp.576-583,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5713
61.

Conference Proceedings

Conference Proceedings
Kumazaki, T. ; Wakabayashi, O. ; Nohdomi, R. ; Ariga, T. ; Watanabe, H. ; Hotta, K. ; Mizoguchi, H. ; Tanaka, H. ; Takahashi, A. ; Okada, T.
Pub. info.: Optical Microlithography XVI.  Part Three  pp.1363-1370,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040