1.

Conference Proceedings
Conference Proceedings
1. Development of EUV light source by CO2-laser-produced Xe plasma
Tanaka, H. ; Akinaga, K. ; Takahashi, A. ; Okada, T.
Pub. info.: Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan.  pp.361-366,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5662
2.

Conference Proceedings
Conference Proceedings
2. Development of EUV light-source by CO2-laser-produced plasma with nano-structured SnO2 targets(LPM 2004 Student Paper Award: Poster)
Tanaka, H. ; Akinaga, K. ; Takahashi, A. ; Okada, T.
Pub. info.: Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan.  pp.313-318,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5662
3.

Conference Proceedings
Conference Proceedings
3. Emission characteristics of EUV light source by CO2 laser-produced Xe and Sn plasma
Tanaka, H. ; Akinaga, K. ; Takahashi, A. ; Okada, T.
Pub. info.: High-Power Laser Ablation V.  pp.737-748,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5448
4.

Conference Proceedings
Conference Proceedings
4. Spectral dynamics analysis of utlra-line-narrowed F2 laser
Kumazaki, T. ; Wakabayashi, O. ; Nohdomi, R. ; Ariga, T. ; Watanabe, H. ; Hotta, K. ; Mizoguchi, H. ; Tanaka, H. ; Takahashi, A. ; Okada, T.
Pub. info.: Optical Microlithography XVI.  Part Three  pp.1363-1370,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040