Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III. pp.389-396, 1994. Pennington, NJ. Electrochemical Society
Matsubara, Y. ; Ohnishi, H. ; Ishigami, T. ; Iguchi, M. ; Nakamura, H. ; Horiuchi, T.
Pub. info.:
Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices. pp.110-118, 1997. Pennington, NJ. Electrochemical Society
Hamada, K. ; Hamajima, T. ; Kitano, T. ; Ohnishi, H. ; Yoshino, A.
Pub. info.:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.1395-1405, 1998. Pennington, NJ. Electrochemical Society
Ikarashi, Yukinori ; Ishizaki, K. ; Bolsaitis, P. ; Ohnishi, H.
Pub. info.:
High-Temperature ordered intermetallic alloys VI : symposium held November 28-December 1, 1994, Boston, Massachusetts, U.S.A.. pp.1059-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society