Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.488-495, 1997. Pennington, NJ. Electrochemical Society
ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology. pp.211-220, 1997. Pennington, NJ. Electrochemical Society
ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology. pp.199-210, 1997. Pennington, NJ. Electrochemical Society
Silicon Nitride and Silicon Dioxide Thin Insulating Films : proceedings of the sixth International Symposium. pp.241-252, 2001. Pennington, N.J.. Electrochemical Society
Morita, H. ; Joo, J.-D. ; Messoussi, R. ; Kawada, K. ; Kim, J.-S. ; Ohmi, T.
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Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.143-150, 1997. Pennington, NJ. Electrochemical Society
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.151-158, 1997. Pennington, NJ. Electrochemical Society
Kwada, K. ; Nakamori, M. ; Morita, H. ; Okano, S. ; Nitta, T. ; Ohmi, T.
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Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.528-535, 1997. Pennington, NJ. Electrochemical Society
Tamai, Y. ; Oka, M.M. ; Nakada, A. ; Shibata, T. ; Ohmi, T.
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ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology. pp.643-654, 1997. Pennington, NJ. Electrochemical Society
The physics and chemistry of SiO2 and the Si-SiO2 interface-4, 2000 : proceedings of the fourth International Symposium on the Physics and Chemistry of SiO2 and the Si-SiO2 Interface, Tronto, Canada, May 15-18, 2000. pp.101-112, 2000. Pennington, N.J.. Electrochemical Society
The physics and chemistry of SiO2 and the Si-SiO2 interface-4, 2000 : proceedings of the fourth International Symposium on the Physics and Chemistry of SiO2 and the Si-SiO2 Interface, Tronto, Canada, May 15-18, 2000. pp.113-124, 2000. Pennington, N.J.. Electrochemical Society
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.339-346, 1994. Pennington, NJ. Electrochemical Society
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.244-251, 1999. Pennington, NJ. Electrochemical Society
Vrtis, R.N. ; Natori, I. ; Ichikawa, A. ; Ino, K. ; Ohmi, T.
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Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III. pp.418-428, 1994. Pennington, NJ. Electrochemical Society
Meuris, M. ; Izumi, H. ; Kubo, K. ; Ojima, S. ; Ohmi, T. ; Heyns, M.M.
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Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.444-448, 1995. Pennington, NJ. Electrochemical Society
Morinaga, H. ; Futatsuki, T. ; Ohmi, T. ; Fuchita, E. ; Oda, M. ; Hayashi, C.
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Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.458-465, 1994. Pennington, NJ. Electrochemical Society
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.280-288, 1997. Pennington, NJ. Electrochemical Society
Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes. pp.223-230, 1997. Pennington, NJ. Electrochemical Society
ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology. pp.197-198, 1997. Pennington, NJ. Electrochemical Society
Matsuura, K. ; Arita, H. ; Ohmi, T. ; Kudoh, M. ; Miyamoto, Y.
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Functionally graded materials VIII : proceedings of the 8th International Symposium on Multifunctional and Functionally Graded Materials (FGM2004) : held in Leuven, Belgium, 11-14 July 2004. pp.225-228, 2005. Switzerland. Trans Tech Publications
Ohmi, T. ; Sekine, K. ; Kaihara, R. ; Saito, Y. ; Shirai, Y. ; Hirayama, M.
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Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.3-, 1999. Warrendale, PA. MRS - Materials Research Society
Iwamoto, T. ; Takano, J. ; Makihara, K. ; Ohmi, T.
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Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.. pp.193-, 1997. Pittsburgh, Penn. MRS - Materials Research Society
Ohmi, T. ; Toda, M. ; Katoh, M. ; Kawada, K. ; Morita, H.
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Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.. pp.3-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Kojima, M. ; Tokumaru, M. ; Fujiki, K. ; Ishida, Y. ; Ohmi, T. ; Hayashi, K. ; Yamashita, M.
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Innovative telescopes and instrumentation for solar astrophysics : 24-28 August 2002, Waikoloa, Hawaii, USA. pp.121-128, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Nii, K. ; Akahori, H. ; Yamamoto, M. ; Teramoto, A. ; Ohmi, T.
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Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium. pp.392-403, 2004. Pennington, N.J.. Electrochemical Society
Nagase, M. ; Kitano, M. ; Wakayama, Y. ; Shirai, Y. ; Ohmi, T.
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Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium. pp.47-53, 2001. Pennington, N.J.. Electrochemical Society
Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium. pp.69-76, 2001. Pennington, N.J.. Electrochemical Society
Tomita, K. ; Migita, T. ; Shimonishi, S. ; Shibata, T. ; Ohmi, T. ; Nitta, T.
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Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects. pp.286-297, 1994. Pennington, NJ. Electrochemical Society
Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II. pp.97-108, 1994. Pennington, NJ. Electrochemical Society
Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium. pp.102-109, 2001. Pennington, N.J.. Electrochemical Society
PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China. pp.2691-2694, 2005. Uetikon-Zuerich. Trans Tech Publications
Yonekawa, N. ; Yasui, S. ; Kunimoto, F. ; Ohmi, T. ; Kern, F.W.
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Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.94-101, 1994. Pennington, NJ. Electrochemical Society
Nakamura, K. ; Futatsuki, T. ; Makihara, K. ; Ohmi, T.
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Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.70-77, 1994. Pennington, NJ. Electrochemical Society
Verhaverbeke, S. ; Futatsuki, T. ; Messoussi, R. ; Ohmi, T.
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Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.1170-1181, 1994. Pennington, NJ. Electrochemical Society
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.3-14, 1994. Pennington, NJ. Electrochemical Society
Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.. pp.259-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.107-114, 1995. Pennington, NJ. Electrochemical Society
Kagami, H. ; Miyagawa, R. ; Kawata, A. ; Nakashima, D ; Kobayashi, S. ; Kitano, T. ; Takeshita, K. ; Kubota, H. ; Ohmi, T.
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Photomask and Next-Generation Lithography Mask Technology IX. pp.252-259, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering