1.

Conference Proceedings
Conference Proceedings
1. The Removal Efficiency of Copper Impurity on Various Silicon Surfaces
Sekine, K. ; Choi, G.-M. ; Morita, H. ; Ohmi, T.
Pub. info.: ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology.  pp.211-220,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-3
2.

Conference Proceedings
Conference Proceedings
2. EFFECT OF pH VALUES IN OZONIZED ULTRAPURE WATER ON CLEANING EFFICIENCY
Yokoi, I. ; Choi, G.-M. ; Ohmi, T.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.69-76,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
3.

Conference Proceedings
Conference Proceedings
3. DIFFERENT ADSORPTION BEHVIORS OF PLATINUM GROUP METALS ONSILICON SURFACES
Yokoi, I. ; Kitami, K. ; Choi, G.-M. ; Ohmi, T.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.102-109,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26