1.

Conference Proceedings
Conference Proceedings
1. Non-Routine Dopant, Impurity and Stoichiometry Characterization of SiGe, SiON and Ultra-Low Energy B-Implanted Si Using Secondary Ion Mass Spectrometry
Magee, Charles W. ; Buyuklimanli, Temel H. ; Marino, John W. ; Novak, Steven W. ; Sahiner, M. Alper
Pub. info.: Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A..  pp.263-276,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 717
2.

Conference Proceedings
Conference Proceedings
2. Non-Routine Dopant, Impurity and Stoichiometry Characterization of SiGe, SiON and Ultra-Low Energy B-Implanted Si Using Secondary Ion Mass Spectrometry
Magee, Charles W. ; Buyuklimanli, H. ; Marino, John W. ; Novak, Steven W. ; Sahiner, M. Alper
Pub. info.: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.439-450,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 716