Optomechatronic systems II : 29-31 October 2001, Newton, USA. pp.311-322, 2001. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Smart structures and materials 1998 : Sensory phenomena and measurement instrumentation for smart structures and materials : 2-4 March 1998, San Diego, California. pp.59-66, 1998. Bellingham. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan. pp.294-297, 1997. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California. Part2 pp.928-936, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Smart structures and materials 1999 : Smart materials technologies : 3-4 March 1999, Newport Beach, California. pp.94-102, 1999. Bellingham. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California. pp.315-324, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
21st Annual BACUS Symposium on Photomask Technology. 4562 pp.1141-1150, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Smart Structures and Materials 1999: Sensory Phenomena and Measurement Instrumentation for Smart Structures and Materials. pp.541-552, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering