Job, R. ; Ulyashin, A.G. ; Huang, Y.L. ; Fahrner, W.R. ; Simoen, E. ; Claeys, C. ; Niedernostheide, F.-J. ; Schulze, H.-J. ; Tonelli, G.
Pub. info.:
Defect and impurity engineered semiconductors and devices III : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.257-262, 2002. Warrendale, Pa. Materials Research Society
Niedernostheide, F.-J. ; Schulze, H.-J. ; Kellner-Werdehausen, U. ; Frohnmeyer, A. ; Wachutka, G.
Pub. info.:
Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany. pp.112-120, 2001. Pennington, N.J.. Electrochemical Society