1.

Conference Proceedings
Conference Proceedings
1. SURFACE AND INTERFACE MORPHOLOGY OF SMALL ISLANDS OF TiSi2 AND ZrSi2 ON (001) SILICON
Kropman, B.L. ; Sukow, C.A. ; Nemanich, R.J.
Pub. info.: Evolution of surface and thin film microstructure : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.589-592,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 280
2.

Conference Proceedings
Conference Proceedings
2. INVESTIGATION OF TITANIUM SILICON AND GERMANIUM REACTION
Aldrich, D.B. ; Sayers, D.E. ; Nemanich, R.J.
Pub. info.: Evolution of surface and thin film microstructure : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.585-588,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 280
3.

Conference Proceedings
Conference Proceedings
3. STRAIN IN GRADED THICKNESS GaAs/Si HETEROEPITAXIAL STRUCTURES GROWN WITH A BUFFER LAYER
Nemanich, R.J. ; Biegelsen, D.K. ; Street, R.A. ; Downs, B. ; Krusor, B.S. ; Yingling, R.D.
Pub. info.: Heteroepitaxy on silicon : fundamentals, structure, and devices : symposium held April 5-8, 1988, Reno, Nevada, U.S.A..  pp.245-250,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 116
4.

Conference Proceedings
Conference Proceedings
4. PROCESS AND SURFACE CHARACTERIZATION OF HYDROGEN PLASMA CLEANING OF Si(100)
Schneider, T.P. ; Cho, J. ; Vander Weide, J. ; Wells, S.E. ; Lucovsky, G ; Nemanich, R.J. ; Mantini, M.J. ; Rudder, R.A. ; Markunas, R.J.
Pub. info.: Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A..  pp.333-338,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 204
5.

Conference Proceedings
Conference Proceedings
5. PLASMA-SURFACE INTERACTION LIMITS FOR REMOTE H-PLASMA CLEANING OF Si(100)
Schneider, T.P. ; Bernhard, B.L. ; Chen, Y.L. ; Nemanich, R.J.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.213-218,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
6.

Conference Proceedings
Conference Proceedings
6. SURFACE ELECTRONIC STATES OF LOW TEMPERATURE H-PLASMA CLEANED Si(100) AND Ge(100) SURFACES
Cho, Jaewon ; Schneider, T.P. ; Nemanich, R.J.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.237-242,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
7.

Conference Proceedings
Conference Proceedings
7. Correlation of Photo Electron Emission Microscopy and Field Emission from Nitrogen-Doped Diamond Films
Nemanich, R.J. ; Koech, F.A.M. ; English, S.L. ; Sowers, A.T.
Pub. info.: Diamond materials : proceedings of the sixth international symposium.  pp.206-215,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-32
8.

Conference Proceedings
Conference Proceedings
8. HYDROGEN PLASMA CLEANING PRIOR TO LOW TEMPERATURE GATE OXIDE DEPOSITION IN CLUSTER FABRICATED MOSFETs
Montgomery, J.S. ; Barnak, J.P. ; Bayoumi, A. ; Hauser, J.R. ; Nemanich, R.J.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.296-306,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
9.

Conference Proceedings
Conference Proceedings
9. REDUCTION OF SURFACE ROUGHENING AND SUBSURFACE DEFECTS IN H-PLASMA CLEANING OF Si (100)
Schneider, T.P. ; Montgomery, J.S. ; Ying, H. ; Barnak, J.P. ; Chen, Y.L. ; Maher, D.M. ; Nemanich, R.J.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.329-338,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
10.

Conference Proceedings
Conference Proceedings
10. SURFACE MORPHOLOGIES AND INTERFACES OF TiSi2 FORMED FROM UHV DEPOSITED Ti ON Si
Jeon, Hyeongtag, ; Nemanich, R.J. ; Honeycutt, J.W. ; Rozgonyi, G.A.
Pub. info.: Layered structures : heteroepitaxy, superlattices, strain, and metastability : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.307-312,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 160
11.

Conference Proceedings
Conference Proceedings
11. *CHEMICAL VAPOR DEPOSITION OF DIAMOND FILMS USING WATER: ALCOHOL:ORGANIC-ACID SOLUTIONS
Ruder, R.A. ; Posthill, J.B. ; Hudson, G.C. ; Malta, D.P. ; Thomas, R.E. ; Markunas, R.J. ; Humphreys, T.P. ; Nemanich, R.J.
Pub. info.: Wide band gap semiconductors : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A..  pp.23-30,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 242
12.

Conference Proceedings
Conference Proceedings
12. Electron Emission from Carbon Films
Nemanich, R.J. ; Koeck, F.A.M. ; Garguilo, J.M.
Pub. info.: Cold cathodes : proceedings of the first International Symposium.  pp.193-200,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-28
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Conference Proceedings
Conference Proceedings
13. THE ROLE OF OXIDE IMPURITIES IN SURFACE RESIDUE NUCLEATION DUE TO ANHYDROUS HF/METHANOL VAPOR PHASE CLEANING
Carter, R.J. ; Hauser, J.R. ; Nemanich, R.J.
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.137-144,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36
14.

Conference Proceedings
Conference Proceedings
14. INFRARED CHARACTERIZATION OF THE HYDROGEN ENVIRONMENTS IN DIAMOND THIN FILMS
LeGrice, Y.M. ; Buehler, E.C. ; Nemanich, R.J. ; Glass, J.T. ; Kobaschi, K. ; Jansen, F. ; Machonkin, M.A. ; Tsai, C.C.
Pub. info.: Diamond, silicon carbide, and related wide bandgap semiconductors : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.267-272,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 162
15.

Conference Proceedings
Conference Proceedings
15. MICROSTRUCTURAL AND OPTICAL CHARACTERIZATION OF GaN FILMS GROWN BY PECVD ON (0001) SAPPHIRE SUBSTRATES
Humphreys, T.P. ; Sukow, C.A. ; Nemanich, R.J. ; Posthill, J.B. ; Rudder, R.A. ; Hattangady, S.V. ; Markunas, R.J.
Pub. info.: Diamond, silicon carbide, and related wide bandgap semiconductors : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.531-536,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 162
16.

Conference Proceedings
Conference Proceedings
16. LOW TEMPERATURE HYDROGEN PLASMA CLEANING PROCESSES OF Si(100), Ge(100), AND SixGe1-x(100)
Schneider, T.P. ; Aldrich, D.A. ; Cho, J. ; Nemanich, R.J.
Pub. info.: Silicon molecular beam epitaxy : symposium held April 29-May 3, 1991, Anaheim, California, U.S.A..  pp.21-26,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 220
17.

Conference Proceedings
Conference Proceedings
17. RAMAN SCATTERING FROM MICROCRYSTALLINE FILMS: CONSIDERATIONS OF COMPOSITE STRUCTURES WITH DIFFERENT OPTICAL ABSORPTION PROPERTIES
Nemanich, R.J. ; Buehler, E.C. ; LeGrice, Y.M. ; Shroder, R.E. ; Parsons, G.N. ; Wang, C. ; Lucovsky, G. ; Boyce, J.B.
Pub. info.: Materials issues in microcrystalline semiconductors : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.265-270,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 164
18.

Conference Proceedings
Conference Proceedings
18. DEPOSITION OF AMORPHOUS AND MICROCRYSTALLINE Si,C ALLOY THIN FILMS BY A REMOTE PLASMA-ENHANCED CHEMICAL-VAPOR DEPOSITION PROCESS
Wang, C. ; Lucovsky, G. ; Nemanich, R.J.
Pub. info.: Amorphous silicon technology 1991 : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.751-756,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 219
19.

Conference Proceedings
Conference Proceedings
19. X-RAY ABSORPTION STUDIES OF TITANIUM SILICIDE FORMATION AT THE INTERFACE OF Ti DEPOSITED ON Si
Aldrich, D.B. ; Fiordalice, R.W. ; Jeon, H. ; Islam, Q. ; Nemanich, R.J. ; Sayers, D.E.
Pub. info.: Atomic scale structure of interfaces : symposium held November 27-29, 1989, Boston Massachusetts, U.S.A..  pp.167-172,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 159
20.

Conference Proceedings
Conference Proceedings
20. GROWTH AND CHARACTERIZATION OF HETEROEPITAXIAL NICKEL FILMS ON DIAMOND SUBSTRATES
Humphreys, T.P. ; Jeon, Hyeongtag ; Nemanich, R.J. ; Posthill, J.B. ; Rudder, R.A. ; Malta, D.P. ; Hudson, G.C. ; Markunas, R.J. ; Hunn, J.D. ; Parikh, N.R.
Pub. info.: Evolution of thin-film and surface microstructure : symposium held November 26-December 1, 1990, Boston, Massachusetts, U.S.A..  pp.463-468,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 202
21.

Conference Proceedings
Conference Proceedings
21. INFLUENCE OF SURFACE PRE-CLEANING ON ELECTRICAL PROPERTIES OF RAPID THERMAL OXIDE AND RAPID THERMAL CHEMICAL VAPOR DEPOSITION OXIDE
Xu, Xiaoli ; Kuehn, R.T. ; Melzak, J.M. ; Hames, G.A. ; Wortman, J.J. ; Ozturk, M.C. ; Nemanich, R.J. ; Harris, G. ; Maher, D.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.81-86,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
22.

Conference Proceedings
Conference Proceedings
22. *RAMAN SPECTROCOPY FOR SEMICONDUCTOR THIN FILM ANALYSIS
Nemanich, R.J.
Pub. info.: Materials characterization : symposium held April 15-17, 1986, Palo Alto California, U.S.A..  pp.23-38,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 69
23.

Conference Proceedings
Conference Proceedings
23. DOMAIN SIZE DETERMINATION IN DIAMOND THIN FILMS
LeGrice, Y.M. ; Nemanich, R.J. ; Glass, J.T. ; Lee, Y.H. ; Rudder, R.A. ; Markunas, R.J.
Pub. info.: Diamond, silicon carbide, and related wide bandgap semiconductors : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.219-224,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 162
24.

Conference Proceedings
Conference Proceedings
24. Raman spectroscopic evaluation of silicides formed with a scanned electron beam
Nemanich, R.J. ; Sigmon, T.W. ; Johnson, N.M. ; Moyer, M.D. ; Lau, S.S.
Pub. info.: Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A..  pp.541-546,  1981.  New York.  North Holland
Title of ser.: Materials Research Society symposia proceedings
Ser. no.: 1
25.

Conference Proceedings
Conference Proceedings
25. Correlated electrical and microstructural studies of recrystallized silicon thin films on bulk glass substrates
Biegelsen, D.K. ; Johnson, N.M. ; Nemanich, R.J. ; Moyer, M.D. ; Fennell, L.E.
Pub. info.: Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A..  pp.331-336,  1982.  New York.  North Holland
Title of ser.: Materials Research Society symposia proceedings
Ser. no.: 4
26.

Conference Proceedings
Conference Proceedings
26. Micro-Raman Mapping and Analysis of Indentation-Induced Phase Transformations in Germanium
Jang, Jae-il ; Lance, M.J. ; Wen, Songqing ; Huening, J.J. ; Nemanich, R.J. ; Pharr, G.M.
Pub. info.: Surface engineering 2004 - fundamentals and applications : symposium held November 30-December 2, 2004, Boston, Massachusetts, U.S.A..  pp.277-282,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 843
27.

Conference Proceedings
Conference Proceedings
27. Chemical, Electrical, and Structural Properties of Au/Pd Contacts on Chemical Vapor Cleaned p-type GaN Surfaces
Hartlieb, P.J. ; Roskowski, A. ; Rodriguez, B.J. ; Nemanich, R.J. ; Davis, R.F.
Pub. info.: GaN and related alloys - 2001 : symposium held November 26-30, 2001, Boston, Massachusetts, U.S.A..  pp.737-742,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 693
28.

Conference Proceedings
Conference Proceedings
28. INITIAL NUCLEATION AND THE EFFECTS ON EPITAXIAL SILICIDE FORMATION
Nemanich, R.J. ; Doland, C.M. ; Fulks, R.T. ; Ponce, F.A.
Pub. info.: Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA.  pp.255-260,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 54
29.

Conference Proceedings
Conference Proceedings
29. IN SITU ELLIPSOMETRIC STUDIES OF PALLADIUM SILICIDE FORMATION
Kelso, S.M. ; Nemanich, R.J. ; Doland, C.M.
Pub. info.: Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA.  pp.23-28,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 54
30.

Conference Proceedings
Conference Proceedings
30. THICKNESS DEPENDENCE OF EPITAXIAL TiSi2 ON Si(111)
Jeon, Hyeongtag ; Honeycutt, J.W. ; Sukow, C.A. ; Rozgonyi, G.A. ; Nemanich, R.J.
Pub. info.: Evolution of thin-film and surface microstructure : symposium held November 26-December 1, 1990, Boston, Massachusetts, U.S.A..  pp.673-678,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 202
31.

Conference Proceedings
Conference Proceedings
31. CW Argon-ion Laser Crystallization of a-Si:H Thin Films
Sunda-Meya, A. ; Gracin, D. ; Dutta, J. ; Vlahovic, B. ; Nemanich, R.J.
Pub. info.: Amorphous and heterogeneous silicon-based films - 2001 : symposium held April 16-20, 2001, San Francisco, California, U.S.A..  2001.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 664
32.

Conference Proceedings
Conference Proceedings
32. Electron Emission Microscopy Measurements of Nitrogen and Sulfer Doped Carbon Films
Koeck, F ; Gupta, S. ; Weiner, B.R. ; Morell, G. ; Garguilo, J.M. ; Brown, B. ; Nemanich, R.J.
Pub. info.: Cold cathodes II : proceedings of the international symposium.  pp.39-44,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-18
33.

Conference Proceedings
Conference Proceedings
33. Measurement of the Effective Piezoelectric Constant of Nitride Thin Films and Heterostructures Using Scanning Force Microscopy
Rodriguez, B.J. ; Kim, D-J. ; Kingon, A.I. ; Nemanich, R.J.
Pub. info.: GaN and related alloys - 2001 : symposium held November 26-30, 2001, Boston, Massachusetts, U.S.A..  pp.571-576,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 693
34.

Conference Proceedings
Conference Proceedings
34. Measurements of the Band Offset of SiO2 on Clean GaN
Hurt, E.H. ; Cook, Ted E. Jr., ; Tracy, K.M. ; Davis, R.F. ; Lucovsky, G ; Nemanich, R.J.
Pub. info.: GaN and related alloys - 2001 : symposium held November 26-30, 2001, Boston, Massachusetts, U.S.A..  pp.577-584,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 693
35.

Conference Proceedings
Conference Proceedings
35. Thermionic FEEM, PEEM and I/V Measurements of N-Doped CVD Diamond Surfaces
Kock, F.A.M. ; Garguilo, J.M. ; Brown, B. ; Nemanich, R.J.
Pub. info.: Electron-emissive materials, vacuum microelectronics and flat-panel displsys : symposium held April 25-27 2000, San Francisco, California, U.S.A..  pp.R6.5-,  2001.  Pittsburgh, PA..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 621
36.

Conference Proceedings
Conference Proceedings
36. Optical Characterization of High Quality GaN Produced by High Rate Magnetron Sputter Epitaxy
Park, Minseo ; Carlson, E. ; Chang, Y.C. ; Muth, J.F. ; Bumgarner, J. ; Kolbas, R.M. ; Cuomo, J.J. ; Nemanich, R.J.
Pub. info.: GaN and related alloys - 2002 : symposium held December 2-6, Boston, Massachusetts, U.S.A..  pp.323-330,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 743