Lu, Y.F. ; Takai, M. ; Sanda, H. ; Chayahara, A. ; Satou, M. ; Minamisono, T. ; Namba, S.
Pub. info.:
In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.301-306, 1990. Pittsburgh, Pa.. Materials Research Society
Takai, M. ; Sato, Y. ; Murakami, K. ; Gamo, K. ; Minamisono, T. ; Namba, S.
Pub. info.:
Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.. pp.91-96, 1982. New York. North Holland