Ishida, S. ; Murase, K. ; Shimamoto, Y. ; Ishibashi, K. ; Gamo, K. ; Namba, S. ; Uematsu, S.
Pub. info.:
Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A.. pp.13-18, 1987. Pittsburgh, Pa.. Materials Research Society
Inoue, K. ; Takai, M. ; Ishibashi, K. ; Kawata, Y. ; Suzuki, N. ; Namba, S.
Pub. info.:
Processing and characterization of materials using ion beams : symposium held November 28-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.381-388, 1989. Pittsburgh, Pa.. Materials Research Society