1.
Conference Proceedings
Nam, D. ; Milster, T. D. ; Chen, T.
Pub. info.:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA . pp.355-367, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5754
2.
Conference Proceedings
Pundaleva, I. ; Nam, D. ; Han, H. ; Lee, D. ; Han, W.
Pub. info.:
Metrology, Inspection, and Process Control for Microlithography XX . pp.61520G-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6152
3.
Conference Proceedings
Nam, D. ; Lee, E. ; Jung, S.-G. ; Kang, Y. ; Yeo, G.-S. ; Lee, J.-H. ; Cho, H.-K. ; Han, W.-S. ; Moon, J.-T.
Pub. info.:
Optical Microlithography XV . Part One pp.57-66, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4691
4.
Conference Proceedings
Nam, D. ; Lee, D. -G. ; Kim, B. ; Moon, S. -Y. ; Choi, S. -W. ; Han, W. -S.
Pub. info.:
25th Annual BACUS Symposium on Photomask Technology . pp.59922W-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5992
5.
Conference Proceedings
Lee, S. ; Kim, B. ; Han, H. ; Nam, D. ; Moon, S. ; Choi, S. ; Han, W.
Pub. info.:
25th Annual BACUS Symposium on Photomask Technology . pp.59924U-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5992
6.
Conference Proceedings
Kim, S.H. ; Nam, D. ; Yoo, G. ; Kim, W.
Pub. info.:
Network Architectures, Management, and Applications . pp.292-299, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5282
7.
Conference Proceedings
Kim, H. ; Nam, D. ; Yeo, G.-S. ; Lee, S.-J. ; Woo, S.-G. ; Cho, H.-K. ; Han, W.-S.
Pub. info.:
Optical Microlithography XVII . pp.459-462, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5377
8.
Conference Proceedings
Nam, D. ; Choi, S. ; Doh, J. ; Noh, Y. ; Lee, H. ; Sin, Y. ; Kim, B. ; Kang, M. ; Han, W.
Pub. info.:
Photomask Technology 2006 . pp.634928-634928, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6349
9.
Conference Proceedings
Milster, T. ; Chen, T. ; Nam, D. ; Schlesinger, T. E.
Pub. info.:
24th Annual BACUS Symposium on Photomask Technology . pp.545-556, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5567