1.
|
Conference Proceedings
|
Nam, D. ; Lee, D. -G. ; Kim, B. ; Moon, S. -Y. ; Choi, S. -W. ; Han, W. -S.
Pub. info.: |
25th Annual BACUS Symposium on Photomask Technology. pp.59922W-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5992 |
|
2.
|
Conference Proceedings
|
Lee, S. ; Kim, B. ; Han, H. ; Nam, D. ; Moon, S. ; Choi, S. ; Han, W.
Pub. info.: |
25th Annual BACUS Symposium on Photomask Technology. pp.59924U-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5992 |
|
3.
|
Conference Proceedings
|
Nam, D. ; Choi, S. ; Doh, J. ; Noh, Y. ; Lee, H. ; Sin, Y. ; Kim, B. ; Kang, M. ; Han, W.
Pub. info.: |
Photomask Technology 2006. pp.634928-634928, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6349 |
|